Fundamentals of Microfabrication and Nanotechnology 3rd ed [3-Volume Set]
File List
- 1. Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology (2011).pdf 27.1 MB
- 2. Manufacturing Techniques for Microfabrication and Nanotechnology (2011).pdf 24.1 MB
- 3. From MEMS to Bio-MEMS and Bio-NEMS - Manufacturing Techniques and Applications (2011).pdf 22.1 MB
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