Huiliang C. Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope 2023

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Huiliang C. Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope 2023

Creation Time	March 1, 2025, 4:20 p.m.
Last Access Time	March 9, 2025, 6:45 p.m.
File Size	10.7 MB
Keywords	C Linear Vibration Gyroscope Silicon-Based Huiliang MEMS 2023 Dual-Mass
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Huiliang C. Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope 2023.pdf 10.7 MB

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